Nanotechnology Laboratory Fees

State-of-the-art Nanofabrication Facilities

Universidad de Oviedo, CINN and Hospital Universitario Public research organizations, Other universities* and partner companies** General Fee
SEM inspection and/or characterization of nanostructures fabricated by lithography techniques with technician (€/hour) 12 24 48
SEM inspection and/or characterization of nanostructures fabricated by lithography techniques without technician (€/hour) 5,5 11 22
Electron Beam Lithography with technician (€/hour) 18 36 72
Electron Beam Lithography without technician (€/hour) 8,5 17 34
Optical Lithography with technician, large wafer (€/hour) 44 88 176
Optical Lithography with technician, small wafer (€/hour) 36 72 144
Optical Lithography without technician (€/hour) 21 42 84
AFM with technician (€/session) 40 80 160
AFM without technician (€/session) 13 26 52
MFM with technician (€/session) 50 100 200
MFM without technician (€/session) 25 50 100
RIE-RIBE with technician (€/session) 32 64 128
RIE-RIBE without technician (€/ session) 6,75 13,5 27

  Notes: These fees have been published in the BOPA on 15th February 2013 BOPA. Fees do not include VAT (21%). * Universities belonging to the G9 Group have a discount of 10% on these rates ** Those companies who have a collaboration agreement with the University of Oviedo, or within the Campus of International Excellence